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a) Initial structure before CMP: typical trench isolation structure... | Download Scientific Diagram
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Pixel device on deep trench isolation (DTI) structure for image sensor Patent Grant Takahashi , et al. September 29, 2 [Taiwan Semiconductor Manufacturing Co., Ltd.]
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Fabrication process flow. (a) Si deep trench etching. (b) Deposited SiO... | Download Scientific Diagram
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Deep Trench Isolation (dti) Bounded Single Photon Avalanche Diode (spad) On A Silicon On Insulator (soi) Substrate Rae; Bruce [STMicroelectronics (Research & Development) Limited]
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